Min. Order Reference FOB Price
1 unit US$510,000.00 / unit
Product Description
Product Description Chemical Vapor Deposition System Equipment Introduction The EPEE 550 series is primarily designed for the deposition of dielectric films such as SiO2, SiNx, and SiON on 2~8-inch wafers. It features a single reaction chamber with a multi-wafer configuration, offering both high ...