Basic Info.
Certification
CE, ISO, RoHS
Transport Package
Plywood
Product Description
ABOUT US Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services. Pudi is the earliest high-tech enterprise engaged in the research and development, design and production of vacuum equipment in Hubei province as key support project. For coating systems we launched products mainly include: PVD evaporation coating equipment (including resistance, electron beam, induction evaporation and other forms), PVD magnetron sputtering coating equipment (developed many standard equipment and production line continuous splash system), PVP ion plating multifunctional coating equipment, plasma cleaning machine / rubber machine, CVD microwave / DC plasma injection / hot wire chemical vapor deposition system, ALD and vacuum Chamber tailor-make / vacuum environment simulation equipment custom system, etc.with many optional features including plasma cleaner, mainly used for thin film deposition for research purposes.Designed and manufactured components by our engineering team meet high-quality standards since many high-ranked universities and research centers are among our valuable customers, who are satisfied with our vacuum coating systems.We also make coating systems according to customers' special inquiries by developing innovative designs.Always welcome your onsite inspection and discussion.
MAIN PRODUCT SERIES* Thermal Evaporator PD-200I / PD-300 / PD-400S / PD-450 / PD-500S / PD-800S
* Electron Bean Evaporator PD-500 / PD-600
* Magnetron Sputtering System PD-280C /PD-300C/PD-400C/ PD-450CS/PD-500C/PD-600C/PD-5000C
*ALD Deposition System ALD-100/ALD-200
*CVD Chemical Vapor Deposition System PD-450Z /PD-650Z /PD-60MP / PD-80MP /PD-450H / PD-600H
* RF Plasma Cleaning Machine PD-150Q / PD-300Q / PD-600Q
* Customized vacuum Products
CONTACT US Address:#18-1, Donghu High-tech Industrial Innovation Base, No.9, Miaoshan Avenue, Jiangxia District, Wuhan,China(PC:430000)
pls contact us with your request for exact tec.specification and quotation.
TEC.INFOS ATT Magnetron Sputtering SystemModel | PD-200C | PD-300C | PD-400C | PD-500C | PD-600C | PD-450CS | PD-550CS |
Application | Widely used in scientific research institutes and laboratories to prepare metal electrode layers, sample preparation for scanning electron microscopy, and research on new organic materials and new processes related to new energy materials. It is used in the research and development of perovskite solar cells, OLED, lithium batteries, quantum dot LED, OPV and other industries, and can prepare ITO oxide, nitride, metal and other thin film materials. At the same time, it is also suitable for multi-material research such as metals, semiconductors, nanotechnology and insulators. |
Materials | Metal materials such as aluminum, titanium, zirconium, chromium, nickel, iron, etc. Oxide materials such as alumina, silicon oxide, titanium oxide Semiconductor materials: such as silicon, germanium, etc. |
size (L×W×H) | 500×500×600mm | 550×900×1850mm | 850×1500×1900mm | 1450×1250×1850mm | 2200×1700×2200mm | 1500×850×1900mm | 1500×850×1900mm |
(L×W×H) | Φ220×H340 Cylindrical | 300×300×380 | 400×400×380 | 500×500×500 | 600×600×500 | 440×440×450 | 500×440×450 |
Ultimate Vacuum | 6×10-5Pa | 7×10-5Pa | 3×10-5Pa | 3×10-5Pa | 3×10-7Pa | 5×10-5Pa | 5×10-5Pa |
Pumping speed Keep pressure | 6×10-4Pa≤20min 12H≤8pa | 8×10-4Pa≤35min 12H≤8pa | 8×10-4Pa≤30min 12H≤8pa | 8×10-4Pa≤35min 12H≤5pa | 5×10-6Pa≤30min 12H≤5pa | 9×10-4Pa≤35min 12H≤5pa | 9×10-4Pa≤35min 12H≤5pa |
Uniformity | Better than ±5% |
Sputter target gun | 2-3 inch target gun 1pc | 2-3 inch target gun 2pcs | 2-3 inch target gun 3pcs | 2-3 inch target gun 4pcs | 2-3 inch target gun 4pcs | Rectangular targets L365mm x W75mm 2pcs | Rectangular targets L450mm x W75mm 2pcs |
Substrate Size | 2-3INCH | 2-4INCH | 2-4INCH | 2-6INCH | 2-6INCH | 200×200mm | 250×250mm |
Control system | Siemens PLC + touch screen manual automatic control; the speed and final thickness can be input, and PID adjustment automatically controls the evaporation power output. |
Address:
18-1, Donghu High-Tech Industrial Innovation Base, No. 9, Miaoshan Avenue, Jiangxia District, Wuhan, Hubei, China
Business Type:
Manufacturer/Factory
Business Range:
Electrical & Electronics, Industrial Equipment & Components, Service
Management System Certification:
ISO 9001
Company Introduction:
At PUDIVAC, our mission is to be the premier supplier and manufacturer of University science equipment and laboratory supplies of thermal Evaporator, Sputtering System, RF plasma cleaner and ALD depositions. We are dedicated to providing top-quality products and exceptional service to educational institutions on thin film deposition Coaters.