MEMC2300PV series mass flow controller is composed of three parts: Mass Flow Meter, Super-High-Speed Proportional Valve, Signal Processing and Control Module.

The mass flowmeter is a MEMS sensor made of CMOS semiconductor process. The working principle of flow measurement adopts the principle of thermal diffusion. The center of the chip is equipped with a heater, and the upstream and downstream sides of the heater are respectively equipped with thermopiles and thermopile temperature measuring elements. A cavity is provided at the bottom of the heater and thermopile array, which can efficiently detect the heat change of the heater. After the heating element introduces a constant current, a corresponding temperature field is formed in the vicinity of the heating element. The flow of the medium redistributes the local temperature field. Because the change in the temperature field has a linear relationship with the fluid mass flow rate, the fluid mass flow rate can be inversely calculated by accurately measuring the temperature field. The sensor uses the principle of thermal diffusion to directly measure the mass flow, basically without pressure and temperature compensation, and applies thermal diffusion to the micrometer scale. Therefore, the mass flowmeter manufactured by this sensor has the characteristics of high accuracy, wide range, sensitivity, and accurate measurement.

Using super-high-speed proportional valve as the actuator, it has the characteristics of no jamming, high efficiency and precise control. High-speed and high-precision control of flow can be achieved by quickly and accurately controlling the valve opening. The valve is available in normally closed and normally open types.

The signal processing and control module is designed and manufactured using high-performance and reliable DSP.

The mass flow meter, super-high-speed proportional valve, and signal processing and control module form a closed-loop mass flow control system. The system integrates advanced adaptive control algorithms, which can effectively suppress random errors in measurement data, so the system has the characteristics of rapid response, high accuracy and good stability.